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Large etch-selectivity enhancement in the epitaxial liftoff of single-crystal films
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10.1063/1.124115
/content/aip/journal/apl/74/21/10.1063/1.124115
http://aip.metastore.ingenta.com/content/aip/journal/apl/74/21/10.1063/1.124115
/content/aip/journal/apl/74/21/10.1063/1.124115
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/content/aip/journal/apl/74/21/10.1063/1.124115
1999-05-24
2014-09-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Large etch-selectivity enhancement in the epitaxial liftoff of single-crystal LiNbO3 films
http://aip.metastore.ingenta.com/content/aip/journal/apl/74/21/10.1063/1.124115
10.1063/1.124115
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