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The contribution of vacancies to carbon out-diffusion in silicon
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10.1063/1.123081
/content/aip/journal/apl/74/3/10.1063/1.123081
http://aip.metastore.ingenta.com/content/aip/journal/apl/74/3/10.1063/1.123081
/content/aip/journal/apl/74/3/10.1063/1.123081
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/content/aip/journal/apl/74/3/10.1063/1.123081
1999-01-18
2014-09-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: The contribution of vacancies to carbon out-diffusion in silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/74/3/10.1063/1.123081
10.1063/1.123081
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