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Time-dependent diffusivity of boron in silicon oxide and oxynitride
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10.1063/1.123425
/content/aip/journal/apl/74/7/10.1063/1.123425
http://aip.metastore.ingenta.com/content/aip/journal/apl/74/7/10.1063/1.123425
/content/aip/journal/apl/74/7/10.1063/1.123425
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/content/aip/journal/apl/74/7/10.1063/1.123425
1999-02-15
2014-08-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Time-dependent diffusivity of boron in silicon oxide and oxynitride
http://aip.metastore.ingenta.com/content/aip/journal/apl/74/7/10.1063/1.123425
10.1063/1.123425
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