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Thermal evolution of impurities in wet chemical silicon oxides
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10.1063/1.123517
/content/aip/journal/apl/74/9/10.1063/1.123517
http://aip.metastore.ingenta.com/content/aip/journal/apl/74/9/10.1063/1.123517
/content/aip/journal/apl/74/9/10.1063/1.123517
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/content/aip/journal/apl/74/9/10.1063/1.123517
1999-03-01
2014-07-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Thermal evolution of impurities in wet chemical silicon oxides
http://aip.metastore.ingenta.com/content/aip/journal/apl/74/9/10.1063/1.123517
10.1063/1.123517
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