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Boride-enhanced diffusion in silicon: Bulk and surface layers
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10.1063/1.124312
/content/aip/journal/apl/75/2/10.1063/1.124312
http://aip.metastore.ingenta.com/content/aip/journal/apl/75/2/10.1063/1.124312
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/content/aip/journal/apl/75/2/10.1063/1.124312
1999-07-12
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Boride-enhanced diffusion in silicon: Bulk and surface layers
http://aip.metastore.ingenta.com/content/aip/journal/apl/75/2/10.1063/1.124312
10.1063/1.124312
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