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The generation and detection of high flux atomic oxygen for physical vapor deposition thin film growth
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10.1063/1.125569
/content/aip/journal/apl/75/26/10.1063/1.125569
http://aip.metastore.ingenta.com/content/aip/journal/apl/75/26/10.1063/1.125569
/content/aip/journal/apl/75/26/10.1063/1.125569
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/content/aip/journal/apl/75/26/10.1063/1.125569
1999-12-27
2014-10-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: The generation and detection of high flux atomic oxygen for physical vapor deposition thin film growth
http://aip.metastore.ingenta.com/content/aip/journal/apl/75/26/10.1063/1.125569
10.1063/1.125569
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