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Stability of proximity gettering of platinum in silicon implanted with alpha particles at low doses
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10.1063/1.124376
/content/aip/journal/apl/75/3/10.1063/1.124376
http://aip.metastore.ingenta.com/content/aip/journal/apl/75/3/10.1063/1.124376
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/content/aip/journal/apl/75/3/10.1063/1.124376
1999-07-19
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Stability of proximity gettering of platinum in silicon implanted with alpha particles at low doses
http://aip.metastore.ingenta.com/content/aip/journal/apl/75/3/10.1063/1.124376
10.1063/1.124376
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