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Activation and deactivation of implanted B in Si
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10.1063/1.124474
/content/aip/journal/apl/75/5/10.1063/1.124474
http://aip.metastore.ingenta.com/content/aip/journal/apl/75/5/10.1063/1.124474
/content/aip/journal/apl/75/5/10.1063/1.124474
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/content/aip/journal/apl/75/5/10.1063/1.124474
1999-08-02
2014-08-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Activation and deactivation of implanted B in Si
http://aip.metastore.ingenta.com/content/aip/journal/apl/75/5/10.1063/1.124474
10.1063/1.124474
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