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High-resistance buried layers by MeV Fe implantation in n-type InP
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10.1063/1.124476
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    Affiliations:
    1 INFM and Dipartimento di Fisica, Università di Padova, Via Marzolo 8, 35131 Padova, Italy
    2 INFM and Dipartimento di Elettronica e Informatica, Università di Padova, Via Gradenigo 6/A, 35131 Padova, Italy
    3 INFM and Dipartimento di Fisica, Università di Bologna, Viale Berti-Pichat 6/2, 40137 Bologna, Italy
    4 INFM and Dipartimento di Fisica, Università di Catania, Corso Italia 57, 95129 Catania, Italy
    5 CNR-Maspec, Parco Area delle Scienze 37/A, 43100 Parma, Italy
    Appl. Phys. Lett. 75, 668 (1999); http://dx.doi.org/10.1063/1.124476
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/content/aip/journal/apl/75/5/10.1063/1.124476
1999-08-02
2014-08-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High-resistance buried layers by MeV Fe implantation in n-type InP
http://aip.metastore.ingenta.com/content/aip/journal/apl/75/5/10.1063/1.124476
10.1063/1.124476
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