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Lithographically induced self-construction of polymer microstructures for resistless patterning
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10.1063/1.124579
/content/aip/journal/apl/75/7/10.1063/1.124579
http://aip.metastore.ingenta.com/content/aip/journal/apl/75/7/10.1063/1.124579
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/content/aip/journal/apl/75/7/10.1063/1.124579
1999-08-16
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Lithographically induced self-construction of polymer microstructures for resistless patterning
http://aip.metastore.ingenta.com/content/aip/journal/apl/75/7/10.1063/1.124579
10.1063/1.124579
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