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Depth analysis of buried iron disilicide formation by Fe ion implantation into Si
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10.1063/1.126048
/content/aip/journal/apl/76/11/10.1063/1.126048
http://aip.metastore.ingenta.com/content/aip/journal/apl/76/11/10.1063/1.126048
/content/aip/journal/apl/76/11/10.1063/1.126048
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/content/aip/journal/apl/76/11/10.1063/1.126048
2000-03-13
2014-09-03
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Depth analysis of buried iron disilicide formation by Fe ion implantation into Si
http://aip.metastore.ingenta.com/content/aip/journal/apl/76/11/10.1063/1.126048
10.1063/1.126048
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