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The kinetics and mechanism of scanned probe oxidation of Si
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14.To obtain an accurate fit of some data a series oxide layer, either on the tip or sample, has to be included in the integration of Eq. (1). Also a voltage offset can be included to take into account differences in work function.
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18.A thin series tip oxide of thickness 0.3 nm was included in these model calculations to account for a small change in tip condition between the data of Figs. 1 and 2.
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