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The kinetics and mechanism of scanned probe oxidation of Si
1.J. A. Dagata, J. Schneir, H. H. Harary, C. J. Evans, M. T. Postek, and J. Bennet, Appl. Phys. Lett. 56, 2001 (1990).
2.J. A. Dagata, T. Inoue, J. Itoh, K. Matsumoto, and H. Yokoyama, J. Appl. Phys. 84, 6891 (1998), and references therein.
3.E. S. Snow and P. M. Campbell, Appl. Phys. Lett. 64, 1932 (1994).
4.E. S. Snow, P. M. Campbell, and F. K. Perkins, Appl. Phys. Lett. 75, 1476 (1999).
5.S. C. Minne, H. T. Soh, Ph. Flueckiger, and C. F. Quate, Appl. Phys. Lett. 66, 703 (1995).
6.K. Matsumoto, S. Takahashi, M. Ishii, M. Hoshi, A. Kurokawa, S. Ichimura, and A. Ando, Jpn. J. Appl. Phys., Part 1 34, 1387 (1995).
7.E. S. Snow, D. Park, and P. M. Campbell, Appl. Phys. Lett. 69, 269 (1996).
8.E. S. Snow, P. M. Campbell, R. W. Rendell, F. A. Buot, D. Park, C. R. K. Marrian, and R. Magno, Appl. Phys. Lett. 72, 3071 (1998).
9.D. Stievenard, P. A. Fontaine, and E. Dubois, Appl. Phys. Lett. 70, 3272 (1997).
10.Ph. Avouris, T. Hertel, and R. Martel, Appl. Phys. Lett. 71, 285 (1997).
11.R. Garcia, M. Calleja, and F. Perez-Murano, Appl. Phys. Lett. 72, 2295 (1998).
12.J. A. Dagata, T. Inoue, J. Itoh, and H. Yokoyama, Appl. Phys. Lett. 73, 271 (1998).
13.P. A. Fontaine, E. Dubois, and D. Stievenard, J. Appl. Phys. 84, 1776 (1998).
14.To obtain an accurate fit of some data a series oxide layer, either on the tip or sample, has to be included in the integration of Eq. (1). Also a voltage offset can be included to take into account differences in work function.
15.R. H. Fowler and L. Nordheim, Proc. R. Soc. London, Ser. A 119, 173 (1928).
16.In two data sets obvious tip changes (evidenced by a discrete change in oxide height) occurred during the data taking process, and these data sets were ignored.
17.N. Cabrera and N. F. Mott, Rep. Prog. Phys. 12, 163 (1948).
18.A thin series tip oxide of thickness 0.3 nm was included in these model calculations to account for a small change in tip condition between the data of Figs. 1 and 2.
19.The data in Fig. 2 exhibit a gradual transition between the vapor and liquid water anodization. The kinetics of the oxide growth in this transition region is likely controlled by the kinetics of the formation of the water bridge itself, e.g., the diffusion of water along the tip surface to the tip-sample interface.
20.Note that Fowler–Nordheim tunneling does not apply to low bias conditions and the form of the tunneling should be modified to more accurately describe the data.
21.R. Waters and B. Van Zeghbroeck, Appl. Phys. Lett. 73, 3692 (1998).
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