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Nonlinear resonance ultrasonic vibrations in Czochralski-silicon wafers
1.F. Kirscht, B. Snegirev, P. Zaumseil, G. Kissinger, K. Takashima, P. Wildes, and J. Henessy, Proceedings of Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices, Proc. SPIE 3322, 60 (1997).
2.Y. Gogotsi, C. Baek, and F. Kirscht, Semicond. Sci. Technol. 14, 936 (1999).
3.R. W. Hoffman, in Physics of Thin Films, edited by G. Hass and T. E. Thun (Academic, New York, 1966), Vol. 3, p. 211.
4.K. C. Le, Vibrations of Shells and Rods (Springer, Berlin, 1999), p. 95.
5.A. H. Nayfeh and D. T. Mook, Nonlinear Oscillations (Wiley, New York, 1979), p. 14.
6.R. Paneva and D. Gotchev, Sens. Actuators 72, 79 (1999).
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