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Interface structures in GaAs wafer bonding: Application to compliant substrates
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10.1063/1.126440
/content/aip/journal/apl/76/19/10.1063/1.126440
http://aip.metastore.ingenta.com/content/aip/journal/apl/76/19/10.1063/1.126440
/content/aip/journal/apl/76/19/10.1063/1.126440
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/content/aip/journal/apl/76/19/10.1063/1.126440
2000-05-08
2014-09-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Interface structures in GaAs wafer bonding: Application to compliant substrates
http://aip.metastore.ingenta.com/content/aip/journal/apl/76/19/10.1063/1.126440
10.1063/1.126440
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