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Investigation of β-SiC precipitation in epilayers by x-ray scattering at grazing incidence
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10.1063/1.126662
/content/aip/journal/apl/76/23/10.1063/1.126662
http://aip.metastore.ingenta.com/content/aip/journal/apl/76/23/10.1063/1.126662
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/content/aip/journal/apl/76/23/10.1063/1.126662
2000-06-05
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Investigation of β-SiC precipitation in Si1−yCy epilayers by x-ray scattering at grazing incidence
http://aip.metastore.ingenta.com/content/aip/journal/apl/76/23/10.1063/1.126662
10.1063/1.126662
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