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Microstructural evolution of laser-exposed silicon targets in atmospheres
1.S. R. Foltyn, in Pulsed Laser Deposition of Thin Films, edited by D. B. Chrisey and G. K. Hubler (Wiley Interscience, New York, 1994), pp. 89–113.
2.M. Birnbaum, J. Appl. Phys. 36, 3688 (1965);
2.J. F. Young, J. E. Sipe, and H. M. van Driel, Phys. Rev. B 30, 2001 (1984).
3.T.-H. Her, R. J. Finlay, C. Wu, S. Deliwala, and E. Mazur, Appl. Phys. Lett. 73, 1673 (1998).
4.A. J. Pedraza, J. D. Fowlkes, and D. L. Lowndes, Appl. Phys. Lett. 74, 2322 (1999).
5.R. F. Wood and G. E. Jellison, Jr., in Semiconductors and Semimetals, edited by R. F. Wood, C. W. White, and R. T. Young (Academic, Orlando, FL, 1984), Vol. 23, p. 165.
6.T. J. Chuang, J. Chem. Phys. 74, 1453 (1981).
7.Y. Matsumi, S. Toyoda, T. Hayashi, and M. Miyamura, J. Appl. Phys. 60, 4102 (1986).
8.D. Bauerle, Laser Processing and Chemistry, 2nd ed. (Springer, Berlin, 1996), p. 253.
9.A. O’Keefe, M. M. Ross, and A. P. Baronavski, Chem. Phys. Lett. 130, 17 (1986).
10.D. B. Geohegan, in Pulsed Laser Deposition of Thin Films, edited by D. B. Chrisey and G. K. Hubler (Wiley, New York, 1994), Chap. 5, p. 115.
11.G. Bloem and L. J. Giling, Curr. Top. Mater. Sci. 1, 147 (1978).
12.T. Makimura, T. Mizuta, T. Ueda, and K. Murakami, in Microcrystalline and Nanocrystalline Semiconductors, edited by M. J. Sailor, C. C. Tsai, L. T. Canham, and K. Tanaka [Mater. Res. Soc. Symp. Proc. 536, 51(1999)].
13.Note that typical expansion velocities are 1–2 cm/μs for laser-generated plasmas in vacuum, so that the plasma expands only 1–2 mm during the 0.1 μs melt duration, even in vacuum.
14.S. De Unamuno and E. Fogarassy, Appl. Surf. Sci. 36, 1 (1989).
15.P. E. Dyer, S. R. Farrar, A. Issa, and P. H. Key, in Laser Ablation of Electronic Materials: Basic Mechanisms and Applications, edited by E. Fogarassy and S. Lazare (North Holland, Amsterdam, 1992), p. 101.
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