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Yttrium silicate formation on silicon: Effect of silicon preoxidation and nitridation on interface reaction kinetics
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10.1063/1.1316073
/content/aip/journal/apl/77/15/10.1063/1.1316073
http://aip.metastore.ingenta.com/content/aip/journal/apl/77/15/10.1063/1.1316073
/content/aip/journal/apl/77/15/10.1063/1.1316073
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/content/aip/journal/apl/77/15/10.1063/1.1316073
2000-10-09
2014-08-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Yttrium silicate formation on silicon: Effect of silicon preoxidation and nitridation on interface reaction kinetics
http://aip.metastore.ingenta.com/content/aip/journal/apl/77/15/10.1063/1.1316073
10.1063/1.1316073
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