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Diagnostics of inductively coupled chlorine plasmas: Measurements of the neutral gas temperature
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10.1063/1.1318727
/content/aip/journal/apl/77/16/10.1063/1.1318727
http://aip.metastore.ingenta.com/content/aip/journal/apl/77/16/10.1063/1.1318727
/content/aip/journal/apl/77/16/10.1063/1.1318727
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/content/aip/journal/apl/77/16/10.1063/1.1318727
2000-10-16
2014-07-11
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Diagnostics of inductively coupled chlorine plasmas: Measurements of the neutral gas temperature
http://aip.metastore.ingenta.com/content/aip/journal/apl/77/16/10.1063/1.1318727
10.1063/1.1318727
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