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Electrical properties of rapid thermal oxides on films
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10.1063/1.126942
/content/aip/journal/apl/77/2/10.1063/1.126942
http://aip.metastore.ingenta.com/content/aip/journal/apl/77/2/10.1063/1.126942
/content/aip/journal/apl/77/2/10.1063/1.126942
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/content/aip/journal/apl/77/2/10.1063/1.126942
2000-07-10
2014-08-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electrical properties of rapid thermal oxides on Si1−x−yGexCy films
http://aip.metastore.ingenta.com/content/aip/journal/apl/77/2/10.1063/1.126942
10.1063/1.126942
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