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Use of scanned laser annealing to control the bamboo grain length of Cu interconnects
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10.1063/1.126973
/content/aip/journal/apl/77/3/10.1063/1.126973
http://aip.metastore.ingenta.com/content/aip/journal/apl/77/3/10.1063/1.126973
/content/aip/journal/apl/77/3/10.1063/1.126973
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/content/aip/journal/apl/77/3/10.1063/1.126973
2000-07-17
2014-09-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Use of scanned laser annealing to control the bamboo grain length of Cu interconnects
http://aip.metastore.ingenta.com/content/aip/journal/apl/77/3/10.1063/1.126973
10.1063/1.126973
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