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Ultraviolet-extended real-time spectroscopic ellipsometry for characterization of phase evolution in BN thin films
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10.1063/1.1358367
/content/aip/journal/apl/78/14/10.1063/1.1358367
http://aip.metastore.ingenta.com/content/aip/journal/apl/78/14/10.1063/1.1358367
/content/aip/journal/apl/78/14/10.1063/1.1358367
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/content/aip/journal/apl/78/14/10.1063/1.1358367
2001-04-02
2014-09-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ultraviolet-extended real-time spectroscopic ellipsometry for characterization of phase evolution in BN thin films
http://aip.metastore.ingenta.com/content/aip/journal/apl/78/14/10.1063/1.1358367
10.1063/1.1358367
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