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Nucleation and growth kinetics of AlN films on atomically smooth 6H–SiC (0001) surfaces
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10.1063/1.1377309
/content/aip/journal/apl/78/23/10.1063/1.1377309
http://aip.metastore.ingenta.com/content/aip/journal/apl/78/23/10.1063/1.1377309
/content/aip/journal/apl/78/23/10.1063/1.1377309
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/content/aip/journal/apl/78/23/10.1063/1.1377309
2001-06-04
2014-12-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nucleation and growth kinetics of AlN films on atomically smooth 6H–SiC (0001) surfaces
http://aip.metastore.ingenta.com/content/aip/journal/apl/78/23/10.1063/1.1377309
10.1063/1.1377309
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