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Atomistic simulations of extrinsic defects evolution and transient enhanced diffusion in silicon
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10.1063/1.1344566
/content/aip/journal/apl/78/7/10.1063/1.1344566
http://aip.metastore.ingenta.com/content/aip/journal/apl/78/7/10.1063/1.1344566
/content/aip/journal/apl/78/7/10.1063/1.1344566
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/content/aip/journal/apl/78/7/10.1063/1.1344566
2001-02-12
2014-10-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Atomistic simulations of extrinsic defects evolution and transient enhanced diffusion in silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/78/7/10.1063/1.1344566
10.1063/1.1344566
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