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Composition, atomic transport, and chemical stability of ultrathin films deposited on Si(001)
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10.1063/1.1405808
/content/aip/journal/apl/79/13/10.1063/1.1405808
http://aip.metastore.ingenta.com/content/aip/journal/apl/79/13/10.1063/1.1405808
/content/aip/journal/apl/79/13/10.1063/1.1405808
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/content/aip/journal/apl/79/13/10.1063/1.1405808
2001-09-24
2014-12-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Composition, atomic transport, and chemical stability of ZrAlxOy ultrathin films deposited on Si(001)
http://aip.metastore.ingenta.com/content/aip/journal/apl/79/13/10.1063/1.1405808
10.1063/1.1405808
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