No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Stiction-controlled locking system for three-dimensional self-assembled microstructures: Theory and experimental validation
1.J. Israelachvili, Intermolecular and Surface Forces (Academic, London, 1991).
2.B. Capella and G. Dietler, Surf. Sci. Rep. 34, 1 (1999).
3.R. Maboudian and R. T. Howe, J. Vac. Sci. Technol. B 15, 1 (1997).
4.C. H. Mastrangelo, Tribol. Lett. 3, 223 (1997).
5.Y. Rollot, S. Régnier, S. Haliyo, L. Buchaillot, J. C. Guinot, and P. Bidaud, in Proceedings of the 2000 IEEE/RSJ International Conference On Intelligent Robots and Systems (2000), Vols. 1–3, p. 653.
6.T. Akiyama, D. Collard, and H. Fujita, J. Microelectromech. Sys. 6, 10(1997).
7.E. Quévy, L. Buchaillot, and D. Collard, IEEE Trans. Electron Devices 48, 1833 (2001).
8.S. M. Sze, VLSI Technology, 2nd ed. (McGraw-Hill, New York, 1988).
Article metrics loading...
Full text loading...
Most read this month
Most cited this month