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Greatly enhanced detection sensitivity for carbon, nitrogen, and oxygen in silicon by secondary-ion-mass spectrometry
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10.1063/1.1388876
/content/aip/journal/apl/79/4/10.1063/1.1388876
http://aip.metastore.ingenta.com/content/aip/journal/apl/79/4/10.1063/1.1388876
/content/aip/journal/apl/79/4/10.1063/1.1388876
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/content/aip/journal/apl/79/4/10.1063/1.1388876
2001-07-23
2014-10-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Greatly enhanced detection sensitivity for carbon, nitrogen, and oxygen in silicon by secondary-ion-mass spectrometry
http://aip.metastore.ingenta.com/content/aip/journal/apl/79/4/10.1063/1.1388876
10.1063/1.1388876
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