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Self-limiting atomic-layer deposition of Si on by alternate supply of and
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10.1063/1.1389508
/content/aip/journal/apl/79/5/10.1063/1.1389508
http://aip.metastore.ingenta.com/content/aip/journal/apl/79/5/10.1063/1.1389508
/content/aip/journal/apl/79/5/10.1063/1.1389508
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/content/aip/journal/apl/79/5/10.1063/1.1389508
2001-07-30
2014-12-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Self-limiting atomic-layer deposition of Si on SiO2 by alternate supply of Si2H6 and SiCl4
http://aip.metastore.ingenta.com/content/aip/journal/apl/79/5/10.1063/1.1389508
10.1063/1.1389508
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