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Heating-mode transition in the capacitive mode of inductively coupled plasmas
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10.1063/1.1456263
/content/aip/journal/apl/80/10/10.1063/1.1456263
http://aip.metastore.ingenta.com/content/aip/journal/apl/80/10/10.1063/1.1456263
/content/aip/journal/apl/80/10/10.1063/1.1456263
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/content/aip/journal/apl/80/10/10.1063/1.1456263
2002-03-11
2014-09-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Heating-mode transition in the capacitive mode of inductively coupled plasmas
http://aip.metastore.ingenta.com/content/aip/journal/apl/80/10/10.1063/1.1456263
10.1063/1.1456263
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