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Reaction steps of silicidation in layered structure
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10.1063/1.1486046
/content/aip/journal/apl/80/24/10.1063/1.1486046
http://aip.metastore.ingenta.com/content/aip/journal/apl/80/24/10.1063/1.1486046
/content/aip/journal/apl/80/24/10.1063/1.1486046
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/content/aip/journal/apl/80/24/10.1063/1.1486046
2002-06-10
2014-11-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Reaction steps of silicidation in ZrO2/SiO2/Si layered structure
http://aip.metastore.ingenta.com/content/aip/journal/apl/80/24/10.1063/1.1486046
10.1063/1.1486046
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