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T-junction tuning system for large-area surface-wave plasma sources
1.M. Moisan, J. Margot, and Z. Zakrzewski, in High Density Plasma Sources, edited by O. A. Popov (Noyes, Park Ridge, NJ, 1996), p. 191.
2.Yu. M. Aliev, H. Schlüter, and A. Shivarova, Guided-Wave-Produced Plasmas (Springer, Berlin, 2000).
3.J. Marec and P. Leprince, J. Phys. IV 8, 1 (1998).
4.H. Sugai, I. Ghanashev, and M. Nagatsu, Plasma Sources Sci. Technol. 7, 192 (1998).
5.M. Moisan, J. Hubert, J. Margot, and Z. Zakrzewski, in Advanced Technologies Based on Wave and Beam Generated Plasmas, NATO Science Partnership Subseries: edited by H. Schlüter and A. Shivarova (Kluwer Academic, Dordrecht, 1999), Vol. 67, p. 23.
6.I. Ghanashev, M. Nagatsu, G. Xu, and H. Sugai, Jpn. J. Appl. Phys., Part 1 36, 4704 (1997).
7.I. Odrobina, J. Kudela, and M. Kando, Proceedings of the 15th Symposium on Plasma Processing, Hamamatsu, Japan (1998), p. 166 (unpublished).
8.J. Kudela, I. Odrobina, and M. Kando: Proceedings of the 4th ICRP and 51st GEC, Maui, Hawaii, (1998), p. 43 (unpublished);
8.Japanese Patent Application No. P2000-299309A, filing date: April 16, 1999 (ANELVA Corporation).
9.C. G. Montgomery and R. H. Dicke, in Principles of Microwave Circuits, edited by C. G. Montgomery, R. H. Dicke, and E. M. Purcell (McGraw-Hill, New York, 1948), Chap. 9, p. 283.
10.I. Odrobina, J. Kudela, and M. Kando, Plasma Sources Sci. Technol. 7, 238 (1998).
11.J. Kudela, Ph.D. thesis, Graduate School of Electronic Science and Technology, Shizuoka University (1999).
12.The initial reflected power of 500 W in Fig. 4 was set intentionally to demonstrate both T-junction theorems in the figure.
13.E. W. Peterson and L. Talbot, AIAA J. 8, 2215 (1970).
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