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Atomic oxygen surface loss coefficient measurements in a capacitive/inductive radio-frequency plasma
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10.1063/1.1490630
/content/aip/journal/apl/81/1/10.1063/1.1490630
http://aip.metastore.ingenta.com/content/aip/journal/apl/81/1/10.1063/1.1490630
/content/aip/journal/apl/81/1/10.1063/1.1490630
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/content/aip/journal/apl/81/1/10.1063/1.1490630
2002-06-25
2014-09-03
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Atomic oxygen surface loss coefficient measurements in a capacitive/inductive radio-frequency plasma
http://aip.metastore.ingenta.com/content/aip/journal/apl/81/1/10.1063/1.1490630
10.1063/1.1490630
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