Direct tunneling leakage current and scalability of alternative gate dielectrics
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15.We consider the simplification of the exponent of the direct tunneling equation [Eq. (1) in Ref. 4] using a binomial expansion and neglecting higher order terms, which leads to The exponent of this equation indicates that, to first order, the leakage current reduction can be described by a figure of merit It is also evident that the slope of the plot is directly related to f, implying that a dielectric with a higher f also has a steeper slope.
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