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High temperature stability of dielectrics on Si: Interfacial metal diffusion and mobility degradation
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10.1063/1.1513662
/content/aip/journal/apl/81/16/10.1063/1.1513662
http://aip.metastore.ingenta.com/content/aip/journal/apl/81/16/10.1063/1.1513662
/content/aip/journal/apl/81/16/10.1063/1.1513662
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/content/aip/journal/apl/81/16/10.1063/1.1513662
2002-10-07
2014-07-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High temperature stability of Al2O3 dielectrics on Si: Interfacial metal diffusion and mobility degradation
http://aip.metastore.ingenta.com/content/aip/journal/apl/81/16/10.1063/1.1513662
10.1063/1.1513662
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