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Micromachined Fabry–Perot interferometer for motion detection
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10.1063/1.1518557
/content/aip/journal/apl/81/18/10.1063/1.1518557
http://aip.metastore.ingenta.com/content/aip/journal/apl/81/18/10.1063/1.1518557
/content/aip/journal/apl/81/18/10.1063/1.1518557
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/content/aip/journal/apl/81/18/10.1063/1.1518557
2002-10-22
2014-07-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Micromachined Fabry–Perot interferometer for motion detection
http://aip.metastore.ingenta.com/content/aip/journal/apl/81/18/10.1063/1.1518557
10.1063/1.1518557
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