No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
All-optical excitation and detection of microelectrical-mechanical systems
1.W. S. Trimmer, Micromechanics and MEMS, Classic and Seminal Papers to 1990 (IEEE, Piscataway, NJ, 1997).
2.V. M. Bright, Selected Papers on Optical MEMS, SPIE Milestone Series, Vol. MS 153 (SPIE, Bellingham, WA, 1999).
3.D. Bishop, P. L. Gammel, and C. R. Giles, Phys. Today 54, 38 (2001).
4.A. Ashkin, Phys. Rev. Lett. 24, 156 (1970).
5.R. C. Gauthier, R. Niall Tait, H. Mende, and C. Pawlowicz, Appl. Opt. 40, 930 (2001).
6.J. E. Graebner, B. P. Barber, P. L. Gammel, D. S. Greywall, and S. Gopani, Appl. Phys. Lett. 78, 159 (2001).
7.T. S. J. Lammerink, M. Elwenspoek, and J. H. J. Fluitman, Proceedings of the IEEE Micro Electro Mechanical Systems, Nara, Japan, 30 January – 2 February 1991 (IEEE, New York, 1991), pp. 160–165.
Article metrics loading...
Full text loading...
Most read this month
Most cited this month