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Low resistivity on narrow polycrystalline silicon lines
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10.1063/1.1492010
/content/aip/journal/apl/81/2/10.1063/1.1492010
http://aip.metastore.ingenta.com/content/aip/journal/apl/81/2/10.1063/1.1492010
/content/aip/journal/apl/81/2/10.1063/1.1492010
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/content/aip/journal/apl/81/2/10.1063/1.1492010
2002-06-27
2014-09-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Low resistivity TiSi2 on narrow p+ polycrystalline silicon lines
http://aip.metastore.ingenta.com/content/aip/journal/apl/81/2/10.1063/1.1492010
10.1063/1.1492010
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