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Ultrathin zirconium silicate gate dielectrics with compositional gradation formed by self-organized reactions
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10.1063/1.1525392
/content/aip/journal/apl/81/22/10.1063/1.1525392
http://aip.metastore.ingenta.com/content/aip/journal/apl/81/22/10.1063/1.1525392
/content/aip/journal/apl/81/22/10.1063/1.1525392
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/content/aip/journal/apl/81/22/10.1063/1.1525392
2002-11-19
2014-12-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ultrathin zirconium silicate gate dielectrics with compositional gradation formed by self-organized reactions
http://aip.metastore.ingenta.com/content/aip/journal/apl/81/22/10.1063/1.1525392
10.1063/1.1525392
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