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Effect of charge transport through silicon nitride on thin gate oxide reliability
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10.1063/1.1526456
/content/aip/journal/apl/81/23/10.1063/1.1526456
http://aip.metastore.ingenta.com/content/aip/journal/apl/81/23/10.1063/1.1526456
/content/aip/journal/apl/81/23/10.1063/1.1526456
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/content/aip/journal/apl/81/23/10.1063/1.1526456
2002-11-25
2014-08-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of charge transport through silicon nitride on thin gate oxide reliability
http://aip.metastore.ingenta.com/content/aip/journal/apl/81/23/10.1063/1.1526456
10.1063/1.1526456
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