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Effects of nitridation of silicon and repeated spike heating on the electrical properties of gate dielectrics
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10.1063/1.1526914
/content/aip/journal/apl/81/23/10.1063/1.1526914
http://aip.metastore.ingenta.com/content/aip/journal/apl/81/23/10.1063/1.1526914
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/content/aip/journal/apl/81/23/10.1063/1.1526914
2002-11-25
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effects of nitridation of silicon and repeated spike heating on the electrical properties of SrTiO3 gate dielectrics
http://aip.metastore.ingenta.com/content/aip/journal/apl/81/23/10.1063/1.1526914
10.1063/1.1526914
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