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Magnetron sputtered epitaxial single-phase thin films
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10.1063/1.1494865
/content/aip/journal/apl/81/5/10.1063/1.1494865
http://aip.metastore.ingenta.com/content/aip/journal/apl/81/5/10.1063/1.1494865
/content/aip/journal/apl/81/5/10.1063/1.1494865
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/content/aip/journal/apl/81/5/10.1063/1.1494865
2002-07-22
2014-10-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Magnetron sputtered epitaxial single-phase Ti3SiC2 thin films
http://aip.metastore.ingenta.com/content/aip/journal/apl/81/5/10.1063/1.1494865
10.1063/1.1494865
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