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Neutral gas temperature estimate in inductively coupled plasmas
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10.1063/1.1497998
/content/aip/journal/apl/81/6/10.1063/1.1497998
http://aip.metastore.ingenta.com/content/aip/journal/apl/81/6/10.1063/1.1497998
/content/aip/journal/apl/81/6/10.1063/1.1497998
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/content/aip/journal/apl/81/6/10.1063/1.1497998
2002-07-30
2014-07-11
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Neutral gas temperature estimate in CF4/O2/Ar inductively coupled plasmas
http://aip.metastore.ingenta.com/content/aip/journal/apl/81/6/10.1063/1.1497998
10.1063/1.1497998
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