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Structural properties of aluminum–nitrogen films prepared at low temperature
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10.1063/1.1498002
/content/aip/journal/apl/81/6/10.1063/1.1498002
http://aip.metastore.ingenta.com/content/aip/journal/apl/81/6/10.1063/1.1498002
/content/aip/journal/apl/81/6/10.1063/1.1498002
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/content/aip/journal/apl/81/6/10.1063/1.1498002
2002-07-30
2014-09-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Structural properties of aluminum–nitrogen films prepared at low temperature
http://aip.metastore.ingenta.com/content/aip/journal/apl/81/6/10.1063/1.1498002
10.1063/1.1498002
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