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Depth-profiling plasma-induced densification of porous low-k thin films using positronium annihilation lifetime spectroscopy
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10.1063/1.1501767
/content/aip/journal/apl/81/8/10.1063/1.1501767
http://aip.metastore.ingenta.com/content/aip/journal/apl/81/8/10.1063/1.1501767
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/content/aip/journal/apl/81/8/10.1063/1.1501767
2002-08-09
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Depth-profiling plasma-induced densification of porous low-k thin films using positronium annihilation lifetime spectroscopy
http://aip.metastore.ingenta.com/content/aip/journal/apl/81/8/10.1063/1.1501767
10.1063/1.1501767
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