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Electrically active defects in silicon produced by ion channeling
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10.1063/1.1580640
/content/aip/journal/apl/82/22/10.1063/1.1580640
http://aip.metastore.ingenta.com/content/aip/journal/apl/82/22/10.1063/1.1580640
/content/aip/journal/apl/82/22/10.1063/1.1580640
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/content/aip/journal/apl/82/22/10.1063/1.1580640
2003-05-27
2014-08-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electrically active defects in silicon produced by ion channeling
http://aip.metastore.ingenta.com/content/aip/journal/apl/82/22/10.1063/1.1580640
10.1063/1.1580640
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