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Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films
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10.1063/1.1583139
/content/aip/journal/apl/82/24/10.1063/1.1583139
http://aip.metastore.ingenta.com/content/aip/journal/apl/82/24/10.1063/1.1583139
/content/aip/journal/apl/82/24/10.1063/1.1583139
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/content/aip/journal/apl/82/24/10.1063/1.1583139
2003-06-10
2014-12-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films
http://aip.metastore.ingenta.com/content/aip/journal/apl/82/24/10.1063/1.1583139
10.1063/1.1583139
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