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Residual stress analysis in ferroelectric thin films fabricated by a sol-gel process
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10.1063/1.1587272
/content/aip/journal/apl/82/25/10.1063/1.1587272
http://aip.metastore.ingenta.com/content/aip/journal/apl/82/25/10.1063/1.1587272
/content/aip/journal/apl/82/25/10.1063/1.1587272
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/content/aip/journal/apl/82/25/10.1063/1.1587272
2003-06-16
2014-12-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Residual stress analysis in ferroelectric Pb(Zr0.52Ti0.48)O3 thin films fabricated by a sol-gel process
http://aip.metastore.ingenta.com/content/aip/journal/apl/82/25/10.1063/1.1587272
10.1063/1.1587272
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