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Small angle x-ray scattering for measuring pore-size distributions in porous low-κ films
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10.1063/1.1539546
/content/aip/journal/apl/82/4/10.1063/1.1539546
http://aip.metastore.ingenta.com/content/aip/journal/apl/82/4/10.1063/1.1539546
/content/aip/journal/apl/82/4/10.1063/1.1539546
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/content/aip/journal/apl/82/4/10.1063/1.1539546
2003-01-22
2014-09-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Small angle x-ray scattering for measuring pore-size distributions in porous low-κ films
http://aip.metastore.ingenta.com/content/aip/journal/apl/82/4/10.1063/1.1539546
10.1063/1.1539546
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