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Liner materials for direct electrodeposition of Cu
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10.1063/1.1610256
/content/aip/journal/apl/83/12/10.1063/1.1610256
http://aip.metastore.ingenta.com/content/aip/journal/apl/83/12/10.1063/1.1610256
/content/aip/journal/apl/83/12/10.1063/1.1610256
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/content/aip/journal/apl/83/12/10.1063/1.1610256
2003-09-15
2014-07-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Liner materials for direct electrodeposition of Cu
http://aip.metastore.ingenta.com/content/aip/journal/apl/83/12/10.1063/1.1610256
10.1063/1.1610256
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