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Crystallographic influence on nanomechanics of (100)-oriented silicon resonators
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10.1063/1.1616652
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    Affiliations:
    1 Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
    2 and Core Research for Evolution Science and Technology (CREST), Japan Science and Technology Corporation (JST), Tokyo 113-0033, Japan
    3 Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
    4 New Industry Creation Hatchery Center (NICHe), Tohoku University, Sendai 980-8579, Japan
    Appl. Phys. Lett. 83, 3189 (2003); http://dx.doi.org/10.1063/1.1616652
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/content/aip/journal/apl/83/15/10.1063/1.1616652
2003-10-07
2014-09-16
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Scitation: Crystallographic influence on nanomechanics of (100)-oriented silicon resonators
http://aip.metastore.ingenta.com/content/aip/journal/apl/83/15/10.1063/1.1616652
10.1063/1.1616652
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