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Effect of intrinsic point defects on copper precipitation in large-diameter Czochralski silicon
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10.1063/1.1617377
/content/aip/journal/apl/83/15/10.1063/1.1617377
http://aip.metastore.ingenta.com/content/aip/journal/apl/83/15/10.1063/1.1617377
/content/aip/journal/apl/83/15/10.1063/1.1617377
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/content/aip/journal/apl/83/15/10.1063/1.1617377
2003-10-07
2014-10-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of intrinsic point defects on copper precipitation in large-diameter Czochralski silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/83/15/10.1063/1.1617377
10.1063/1.1617377
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